01
2–8 Inch Wafer-Level Optical Resources
Wafer-level optical resources can support 2–8 inch optical microstructure processes, including lithography, nanoimprint, etching, coating-related process discussion and 3D profile measurement.
02
±1μm Wafer Alignment Accuracy
Reference optical process data includes 8 inch wafer alignment accuracy of ±1μm, supporting discussions around MLA, silicon lens arrays, coupling optics and microstructure alignment.
03
±0.4% Profile Uniformity
Surface profile uniformity can be controlled toward ±0.4%, supporting micro-lens arrays, silicon lenses, coupling lenses and other wafer-level optical component discussions.
04
φ5–900μm Silicon / Quartz Lens Options
Silicon and quartz lens resources can cover φ5–900μm lens diameters for VCSEL collimation, coupling optics, silicon lens arrays and compact optical source designs.
05
RMS <25nm Surface Profile Error
Silicon lens reference data includes surface profile error below 25nm RMS, supporting high-precision coupling lenses, collimation lenses, lens arrays and micro-optical components.
06
Collimation, Diffuser and Coupling
Optical design discussions can include VCSEL collimation, diffuser customization, coupling optics, MLA, silicon lens arrays, custom spot size, beam uniformity and module-level optical path integration.